Ultrasonic Spray Coating System
Fig: Automated Ultrasonic Spray Coating Equipment (Manufactured by PMC)
This equipment utilizes advanced ultrasonic spraying technology. The core principle involves using 28KHz high-frequency ultrasonic vibrations to atomize liquid materials into micron-sized droplets, which are then uniformly deposited onto the substrate surface.
Compared to traditional spray coating processes, this system integrates a mesh conveyor unit and a cleaning/drying unit. When the conveyor belt becomes stained with slurry during the spraying process, the system can automatically perform cleaning and drying procedures. This systematically resolves the issue of substrate backside contamination (back-staining), ensuring high process yields and environmental cleanliness.
| Equipment Dimensions | L2570 mm * W1700 mm * H2100 mm |
|---|---|
| Sprayable Area | Up to 500 mm |
| Mesh Conveyor System | L2420 mm * W700 mm (Effective Width: 650 mm) |
| Ultrasonic Spray Module | 28KHz Vortex Ultrasonic Spray Nozzle |
| Ultrasonic Driver | Output Power 14W, 28~150 kHz Digital Frequency Locking Control |
| Precision Feed System | Flow variance within 1%, Pulse amplitude within 5% |
| Conveyor Speed | 0 ~ 6 M/min |
- Semiconductor Processes: Precision coating of various functional thin films.
- Optoelectronics Industry: Deposition of anti-reflection and electrode layers for solar cells.
- Biomedical Sensing: Fabrication of biocompatible coatings and sensing components.
- Energy Materials: Catalyst layer coating for fuel cell proton exchange membranes (PEM).
