View count: 76

Probe Station

Probe Station

Equipment Overview

Probe Station Equipment

The Probe Station is a precision instrument equipped with a high-precision positioning stage and an optical microscope, used for electrical measurements at the wafer or chip level.

  • Can be used in conjunction with a Semiconductor Parameter Analyzer (HP4145B) or an Automated Test System (V101).

Key Functions

  • Performs I-V, C-V, functional testing, and Failure Analysis (FA).
  • Supports measurement of wafers, discrete components, and packaged IC samples.
  • Features micron-level positioning accuracy to ensure stable contact and accurate signal measurement.

Application Fields

  1. Component Electrical Analysis
  2. Process Validation
  3. Fault Localization
  4. Educational Experiments